Verfahren zur Kuehlung von Zerstaeubungsquellen

The process for cooling atomizer and vaporizer sources is used to cooling the atomized and vaporized material. In previous water cooling processes, it is not only difficult to regulate the target temperature, cooling water consumption is very high. The cooling system is designed to be easy to regulate. A cooling medium composed of two components is introduced through the cooling conduits of the cooling plate so that a poor heat-conducting medium I (air) is first passed through and, if the nominal temperature is exceeded, a good heat-conducting medium (II) (water) is added. The volume of the medium II is regulated so that the nominal temperature is kept constant.