MOBILER HALTER FUER EINEN WAFER

WO 200211184 A UPAB: 20020621 NOVELTY - Mobile holder has a base element (1) of a semiconductor or ceramic material, provided with a fixing device (3,4,5), having a functional layer (5) and an electrode structure (3,4) applied to an insulation layer (2), used for electrostatically attaching the semiconductor wafer to the base element and a second fixing device for attaching the mobile holder to a carrier, provided with a conductor for contacting the electrode structure of the first fixing device. USE - The mobile holder is used for handling a semiconductor wafer, e.g. for chip card manufacture. ADVANTAGE - The electrostatic retention of the semiconductor wafer prevents physical damage to the latter.