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Verfahren zur Herstellung von Siliciumschichten
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Patent
Title
Verfahren zur Herstellung von Siliciumschichten
Other Title
Process for the production of silicon layers
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Inventor(s)
Sigmund, H.
Link to Espacenet
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=2621145A
Patent Number
1976-2621145
Publication Date
1978
Language
German
IFT
