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  4. Verfahren zur Abscheidung von farbigen Schichten auf Substrate und Vorrichtung zur Durchfuehrung des Verfahrens
 
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Patent
Title

Verfahren zur Abscheidung von farbigen Schichten auf Substrate und Vorrichtung zur Durchfuehrung des Verfahrens

Other Title
Process for the deposition of coloured layers on substrates and device for performing the process
Abstract
The invention relates to a process for the deposition of coloured layers on substrates, in which light is injected from an external light source into the recipients and guided onto the substrate, the transmitted and/or reflected light for the recipients is sent to a detector during the layer build-up, the detector is linked to a computer where the intensity values are converted into colour actual values and the computer controls the evaporation units as a factor of the colour actual value from a colour reference value entered in the computer until said reference value is reached.
Inventor(s)
Jaeger, S.
Schultz, G.
Link to:
Espacenet
Patent Number
1995-19515172
Publication Date
1996
Language
German
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
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