Verfahren zur herstellung von Schichten aus kubischem Bornitrid

Prodn. of wear-resistant layers of cubic boron nitride comprises spraying with high freq. or D.C. unbalanced magnetron sputtering, in which plasma is produced by D.C. arc discharges or D.C.-operated magnetron-cathodes. A target made of electrically conducting boron carbide is used as the target and the stoichiometry of the layer is adjusted by introducing N2 and Ar. USE - Used in the mfr. of wear-resistant tools (claimed). ADVANTAGE - The process is efficient and inexpensive, allows high deposition rates and low substrate temps.