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Patent
Title

Reinraum-Handhabungssystem

Other Title
Cleanroom handling system
Abstract
The description refers to a cleanroom handling system which comprises a multi-axis handling unit to which is attached a gripper fitted with gripper jaws for handling waters, carriers or similar, and which is controlled by a control unit. The handling system according to the invention is characterized by the fact that the handling unit comprises a basic part, which consists of two axes whose movable parts are arranged outside the handling part in such a way that the flow is continued to such an extent that the handled part is continuously sprayed with cleanroom fresh air, and also comprises a connecting flange by means of which the basic part can be connected with further elements.
Inventor(s)
Geissinger, J.
Haegele, M.
Link to:
Espacenet
Patent Number
1991-4106617
Publication Date
1994
Language
German
Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA  
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