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  4. VORRICHTUNG ZUR ERZEUGUNG KURZER TEILCHENSTRAHLPULSE
 
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Patent
Title

VORRICHTUNG ZUR ERZEUGUNG KURZER TEILCHENSTRAHLPULSE

Other Title
Device for generating short particle beam pulses
Abstract
The device comprises means for the generation of a continuous particle beam and in particular an electron beam, a diaphragm for a particle beam, and an electrode arrangement arranged in front of the diaphragm having at least two parallel electrically conductive conductors, and which generates an electrical field acting on the particle beam. Said field changes in order to attain a high rate of change of the angular deviation of the particle beam in relation to the location of the diaphragm as a function of the time of entry of the particles.
Inventor(s)
Helmreich, K.
Mueller Glaser, K.
Nagel, P.
Link to:
Espacenet
Patent Number
1991-4110194
Publication Date
1994
Language
German
Fraunhofer-Institut für Integrierte Schaltungen IIS  
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