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Patent
Title

Lichtmessanordnung zur Detektion von Oberflaechendefekten

Other Title
Light measuring setup to detect surface defects
Abstract
The invention relates to a light measuring setup for the detection of surface defects (scratches, scores, spot defects, etc. The light measurement setup consists of a laser source (6), a rotating sample support (2) to receive the object under test (10) and a drive motor (3) and a sensor unit (1) comprising two receivers, whereby one receiver is designed as a multiple ring detector (4) to detect radial light distribution and the second receiver is designed as an annular array (5) to detect azimuth distribution.
Inventor(s)
Truckenbrodt, H.
Schroeter, T.
Weigel, T.
Link to:
Espacenet
Patent Number
1991-4134747
Publication Date
1997
Language
German
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
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