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Title

Mikropumpe

Date Issued
2011
Author(s)
Pabst, Oliver
Beckert, Erik
Patent No
102011107046
Abstract
The micro pump has fluid substrate (2) that is equipped with a pump chamber (1) which is entirely covered by a polymer membrane (3) made of polycarbonate. The polymer membrane is actuated by membrane actuators (6,7) containing metals, carbon nanotubes and electrically conductive polymers. The fluid inflow and inflow processes are performed through a micro-channel. Several nanoscale surface structures are provided at specific regions of micro-channel, such that directed pumping action is achieved by direction-dependent flow resistance. An independent claim is included for a method for producing micro pump.
Language
de
Institute
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Link
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=102011107046A1
Patenprio
DE 102011107046 A1: 20110711
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