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Patent
Title

Spektralzerlegungsvorrichtung und Herstellung derselben

Other Title
Spectral dispersion device e.g. transform spectrometer, for analyzing sample, has exit-side construction element fixed at substrate stack such that exit window is partially covered and optical exit diaphragm is defined
Abstract
The device (10) has an optical entrance window (16) and an optical exit window (18) or a detector zone (20) formed on a substrate stack (12). A folded optical path (14) is formed between the entrance window and the exit window or the detector zone. An entrance-side construction element (22) is fixed at the substrate stack such that the entrance window is partially covered and an optical entrance diaphragm (24) is defined. An exit-side construction element is fixed at the substrate stack such that the exit window is partially covered and an optical exit diaphragm is defined. An independent claim is also included for a method for manufacturing a spectral dispersion device.
Inventor(s)
Pügner, T.
Knobbe, J.
Grüger, H.
Link to:
Espacenet
Patent Number
102010040768
Publication Date
2010
Language
German
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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