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Patent
Title
Verfahren zur Herstellung von dreidimensionalen Wellenleiterstrukturen
Other Title
Three-dimensional waveguide structures and process for their production
Abstract
The invention relates to novel three-dimensional waveguide structures and a process for the production of three-dimensional waveguide structures. The three-dimensional waveguide structures are used in the field of miniaturized optics (integrated optics, microoptics) for applications in information transmission, information processing and metrology. In accordance with the invention, the production of three-dimensional structures is linked by a shaping process, for example casting, stamping, injection stamping, injection moulding, and the simultaneous or consecutive generation of a structuring change in the refractive index of areas close to the surface by radiation with ionizing radiation, e.g. UV, ions. The combination of shaping and radiation is used so that the three-dimensional structure and the structured change in refractive index can adjust itself in a spatial relationship in the desired way.
Inventor(s)
Dannberg, P.
Braeuer, A.
Karthe, W.
Link to:
Patent Number
1994-4411860
Publication Date
1998
Language
German