Patent
Title

Verfahren zur Abscheidung einer Bor und Stickstoff enthaltenden Schicht

Other Title
Process for the deposition of a layer containing borium and nitrogen
Abstract
The description relates to a process for the deposition of layers containing B and N with N-substituted borazoles, in particular according to a plasma CVD process.
Inventor(s)
Doellein, G.
Weidenbach, G.
Meyer, H.
Bringmann, U.
Weber, A.
Klages, C.-P.
Link to:
Patent Number
1991-4113791
Publication Date
1992
Language
German