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Patent
Title

Verfahren zur Herstellung eines Chips

Other Title
Method for manufacturing three-dimension integrated chip, involves connecting contact surfaces of isolated components with integrated circuit portions of substrate, and removing another substrate from isolated components
Abstract
The method involves providing (14) a substrate (16) i.e. silicon wafer, with multiple integrated circuit portions (18a, 18b), which are arranged at predetermined positions. Multiple isolated components (22a, 22b) are applied (20) on another substrate (24). The substrates are placed such that contact surfaces (K22a, K22b) of the isolated components are aligned with the predetermined positions of the circuit portions. The contact surfaces of the isolated components are connected (28) with the circuit portions. The latter substrate is removed (30) from the isolated components.
Inventor(s)
Klumpp, Armin  
Ramm, Peter  
Link to:
Espacenet
Patent Number
102012200258
Publication Date
2012
Language
German
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
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