PUMP ARRANGEMENT COMPRISING A SAFETY VALVE ARRANGEMENT

A pump arrangement comprises a microfluidic pump (20) having a pump inlet (22) and a pump outlet (24), which is configured to pump a fluid from the pump inlet to the pump outlet, wherein the pump inlet (22) and an inlet (46) of the pump arrangement are fluidically connected. The pump arrangement further comprises a safety valve arrangement having first safety valve (40), the first safety valve (40) being arranged between the pump outlet (24) and an outlet (48) of the pump arrangement and comprising a first valve seat (42) and a first valve lid (44). The outlet (48) of the pump arrangement and a first fluid region (50), which are fluidically connected, are formed in a first part (10) of the pump arrangement, wherein the first valve lid (44) is formed in a second integrated part (12) of the pump arrangement, and wherein the first valve seat (42), the pump outlet (24) and the pump inlet (22) are patterned in a second surface of a third integrated part (14) of the pump arrangement. The second integrated part (12) is arranged between the first integrated part (14) and the third part (10) of the pump arrangement, wherein the first fluid region (50) is adjacent to the first valve lid (44), and wherein a pressure in the first fluid region (50) has a closing effect on the first safety valve (40).