Mikrominiaturisierte elektrostatische Pumpe

A microminiaturized electrostatic pump has two electrodes placed at intervals in the direction of pump flow for the injection or acceleration of an ion stream or at least an electrode support. To facilitate the adjustment of the two electrodes, the electrode support has one of the two electrodes attached to its two main surfaces, and is isolated at least to one of the two electrodes and has at least one flow opening extending vertically to its main surfaces.