Verfahren und Vorrichtung zur Ansteuerung einer Mikropumpe

The invention relates to a process and a device for controlling a micropump by means of a driver signal in such a way that a conveyance direction defined by a valve structure is reversed, whereby the driver signal is applied to the micro diaphragm pump at an exciter frequency, whereby the exciter frequency is in the range of a resonance of a system formed from the movable parts of the micropump and the fluid to be pumped.