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  4. Halbleiterstrukturen mit vorteilhaften Hochfrequenzeigenschaften sowie Verfahren zur Herstellung derartiger Halbleiterstrukturen
 
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Patent
Title

Halbleiterstrukturen mit vorteilhaften Hochfrequenzeigenschaften sowie Verfahren zur Herstellung derartiger Halbleiterstrukturen

Other Title
Semiconductor structures with advantageous high frequency characteristics and process for the production of such semiconductor structures
Abstract
Process for the production of a semiconductor structure having a highly conductive buried layer, said process consisting of the following steps: application of an insulation layer on a first surface of a first semiconductor substrate, application of an insulation layer on a surface of a surface consisting of a highly conductive material, said layer being separated from the first semiconductor substrate, and connection of the two insulation layers.
Inventor(s)
Plettner, A.
Haberger, K.
Link to:
Espacenet
Patent Number
1994-4433330
Publication Date
1997
Language
German
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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