Vorrichtung zur Inspektion von Testobjekten

The inspection device uses an X-ray tube (1) and a cooperating detector (2), each having a narrow field of view relative to the horizontal extent of the examined object (3) and displaced relative to the latter in an x-y plane. The object may be held in a holder during examination via an X-ray tube providing a focal fleck with a diameter above 10 microns and a CCD detector, which is coupled t an evaluation device with a microprocessor. USE - For inspection of circuit board without damage to solder connections.