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Patent
Title
Verfahren zur Herstellung von Diamantschichten
Other Title
Process for producing diamond layers
Abstract
The invention relates to a process for the production of diamond layers on substrates containing Fe by means of CVD, whereby prior to the vapour-deposition of the diamond on the substrate containing Fe, a SiC barrier layer is deposited
Inventor(s)
Jiang, X.
Six, R.
Klages, C.-P.
Patent Number
1992-4235015
Publication Date
1994
Language
German