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Patent
Title

Oberflaechenwellen-Fluessigkeitssensor

Other Title
Surface wave liquid sensor with comb shaped electrodes formed on piezoelectric substrate - arranged as interdigital converter with several finger pairs and electrodes such that surface volume shear waves from transmitter converter have varying frequencies.
Abstract
The liquid sensor has several comb shaped electrodes (12,14,16,18) which are formed as an interdigital converter (20,22) producing an electroacoustic wave (24) from a transmitter converter (20) to a receiver converter (22). The number of finger pairs (26) of the interdigital converter, and the material from which the electrodes are made, are selected, such that a surface shear wave produced by the transmitter converter, and a volume shear wave produced by the transmitter converter, have different frequencies. The selected electrode material has a high mass per unit area. The selected electrode material has a low sound propagation speed. Respectively two fingers of an electrode are arranged near to each other in the interdigital converter, and form a pair (26). One pair of an electrode with an adjacently arranged pair of the second electrode, form a quartet of fingers. ADVANTAGE - Provides high sensitivity with respect to liquid characteristics and small sensitivity to adverse influence s.
Inventor(s)
Leidl, A.
Link to Espacenet
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=19630890A
Patent Number
1996-19630890
Publication Date
1998
Language
German
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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