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Patent
Title
Reinraumeinrichtung
Other Title
Cleanroom system
Abstract
The proposed device exhibits an air conditioning module which is provided with at least one intake opening and at least one outlet opening. A particular feature is the provision of at least two outlet openings facing an inner chamber which conduct air on different cleanroom qualities in specific areas of the inner chamber. The inner chamber is restricted by a base module and a hood arranged above the base module. The hood surrounds a local cleanroom at least in parts.
Inventor(s)
Fruehauf, W.
Link to:
Patent Number
1991-4121327
Publication Date
1992
Language
German