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Patent
Title
Verfahren zur Messung physikalischer Eigenschaften eines Teilchenstromes und Vorrichtung zur Durchfuehrung des Verfahrens
Other Title
Process for the measurement of the physical properties of a particle beam and device for the performance of the process
Abstract
The description refers to a process and a device for the measurement of the physical properties of a particle beam composed of a specific particle source, in particular a dry etching machine. In order to measure the relevant parameters of the particle beam, several devices were previously required. The summary of results from the various measurements contains errors. In the process and device according to the invention, an in-situ measurement of the energy distribution, mass distribution and direction distribution of the particles of a particle beam is performed in a device. Based on the measurement results, the particle sources can be optimized with respect to the requirements for the generation of very small structures in microelectronics.
Inventor(s)
Janes, J.
Patent Number
1990-4016108
Publication Date
1994
Language
German