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  4. Method for characterizing movable micro-mirror for projector used in e.g. digital camera, involves determining function parameters of micro-mirror by evaluating device, based on detected portions of test image of micro-mirror
 
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Patent
Title

Method for characterizing movable micro-mirror for projector used in e.g. digital camera, involves determining function parameters of micro-mirror by evaluating device, based on detected portions of test image of micro-mirror

Abstract
The method involves generating the steerable and modulatable light beams (220) by a light beam generating unit (200). The test images (240) of a movable micro-mirror (210) are generated by deflecting the movable micro-mirror and by modulating the light beams directed towards the micro-mirror. The upper edge, lower edge, right edge and left edge of test image are detected by a surface sensor (250). The function parameters such as mechanical parameters and image quality parameters of micro-mirror are determined by an evaluating device (260), based on detected portions of test image. Independent claims are included for the following: (1) device for characterizing movable micro-mirror; and (2) computer program for characterizing movable micro-mirror.
Inventor(s)
Specht, H.
Kurth, S.
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Gessner, T.
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
Fiess, R.
Krayl, O.
Krueger, M.
Wiest, G.
Hilberath, T.
Link to:
Espacenet
Patent Number
102010003080
102010003608
Publication Date
2011
Language
German
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
ENAS  
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