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Title

Halbleiterfotodiode

Date Issued
2016
Author(s)
Runge, Patrick
Beckerwerth, Tobias
Seifert, Sten
Patent No
102015210343
Abstract
The invention relates to a semiconductor photodiode comprising a light-absorbing layer (111); an optical waveguide (12) by means of which the light (L) can be coupled into said light-absorbing layer (111) in an evanescent manner; and a doped contact layer (113) arranged between said light-absorbing layer (111) and optical waveguide (12). According to the invention, the optical waveguide (12) is doped in at least some sections generating a diffusion barrier that counteracts diffusion of the dopant of the contact layer (113) into the optical waveguide (12). The invention also relates to a method for producing a semiconductor photodiode.
Language
de
Institute
Fraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI
Link
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=102015210343A1
Patenprio
DE 102015210343 A1: 20150604
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