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  4. Piezoelektrischer Resonator, Verfahren zur Herstellung des Resonators sowie dessen Einsatz als Sensorelement zum Erfassen der Konzentration eines in einem Fluid enthaltenen Stoffes und/oder der Bestimmung physikalischer Eigenschaften des Fluids
 
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Title

Piezoelektrischer Resonator, Verfahren zur Herstellung des Resonators sowie dessen Einsatz als Sensorelement zum Erfassen der Konzentration eines in einem Fluid enthaltenen Stoffes und/oder der Bestimmung physikalischer Eigenschaften des Fluids

Date Issued
1999
Author(s)
Koesslinger, C.
Nitsch, A.
Uttenthaler, E.
Haerle, T.
Patent No
1997-19734706
Abstract
Piezoelectric resonator has an electrode region applied on the surface of the resonator and a counter electrode region. A first side of the resonator provides an electrode region electrically connected to an electrode region on the second side of the resonator, on which is provided a counter electrode region electrically insulated from the electrode region. Also claimed is a process for forming a coating on a substrate plate of a resonator. USE - In a sensor element for determining the concentration of a material contained in a fluid or for determining physical properties of a fluid, especially biochemical materials. ADVANTAGE - The resonator is reliable and can be electrically contacted without the danger of short circuits.
Language
de
Institute
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
Link
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=19734706A
Patenprio
DE 1997-19734706 A: 19970811
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