MIKROSYSTEM UND VERFAHREN ZUM HERSTELLEN EINES MIKROSYSTEMS
NOVELTY - The microsystem has a flexible foil (12), a number of semiconducting elements (14) embedded in the foil and at least one connecting line (16) essentially mounted on the foil for electrically connecting at least two semiconducting elements. The semiconducting elements are arranged with respect to the foil so that the microsystem has a locally different flexibility. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method of manufacturing a microsystem . USE - Esp. flexible microsystems for sensing applications. ADVANTAGE - A reliable and yet highly flexible microsystem is achieved. DESCRIPTION OF DRAWING(S) - The drawing shows a general schematic representation of a microsystem. Flexible foil 12 Semiconducting elements 14 Connecting line 16 .
WO 1998EP00344 A: 19980122