• English
  • Deutsch
  • Log In
    Password Login
    or
  • Research Outputs
  • Projects
  • Researchers
  • Institutes
  • Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Patente
  4. Vorrichtung zum Verdampfen von Fluessigkeiten
 
  • Details
Options
Title

Vorrichtung zum Verdampfen von Fluessigkeiten

Date Issued
1994
Author(s)
Klumpp, A.
Hacker, E.
Patent No
1993-4319387
Abstract
The object of the invention is a device for the evaporation of liquids, in particular of liquid starting substances in the semiconductor industry. The evaporation device according to the invention comprises a heated container with an inlet and outlet, whereby the container wall consists of an outer coating (1) impermeable to liquid and gas, and an inner porous coating (2). The entire inner coating, which, for example, can consist of sinter material, forms the evaporation surface for the liquid. This ensures a complete evaporation of the liquid introduced into the container under optimum control conditions and in an advantageous manner. The evaporation device is used, for example, in the CVD process in semiconductor technology
Language
de
Institute
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
Link
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=DE&NR=4319387A
Patenprio
DE 1993-4319387 A: 19930611
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Send Feedback
© 2022