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Patent
Title

Ultrasound sensor for recording and/or scanning objects and corresponding manufacturing method

Other Title
Siliziumabsorberschicht für Dünnschicht-Ultraschallsensoren
Abstract
An ultrasonic sensor for detecting and/or scanning an object includes a substrate and a piezoelectric sensor unit arranged on or at this substrate and/or connected to this substrate. The rear side of the substrate facing away from the piezoelectric sensor unit has a surface structure including a plurality of elevated portions and recesses, with this surface structure being configured so that a diffuse scattering of ultrasonic waves incident on the rear side from the direction of the sensor unit takes place by it; and/or in that its elevated portions and/or recesses have a mean lateral extent in the range of 0.05 [mu]m to 1 mm, preferably from 0.1 [mu]m to 200 [mu]m, preferably from 0.2 [mu]m to 20 [mu]m, and/or a mean lateral extent which is smaller than or equal to the wavelength of an ultrasonic wave which can be produced by the piezoelectric sensor unit.
Inventor(s)
Herzog, T.
Heuer, H.
Link to Espacenet
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=EP&NR=20100000489A
Patent Number
20100000489
Publication Date
2011
Language
English
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