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Title

Ultrasound sensor for recording and/or scanning objects and corresponding manufacturing method

Date Issued
2011
Author(s)
Herzog, T.
Heuer, H.
Patent No
20100000489
Abstract
An ultrasonic sensor for detecting and/or scanning an object includes a substrate and a piezoelectric sensor unit arranged on or at this substrate and/or connected to this substrate. The rear side of the substrate facing away from the piezoelectric sensor unit has a surface structure including a plurality of elevated portions and recesses, with this surface structure being configured so that a diffuse scattering of ultrasonic waves incident on the rear side from the direction of the sensor unit takes place by it; and/or in that its elevated portions and/or recesses have a mean lateral extent in the range of 0.05 [mu]m to 1 mm, preferably from 0.1 [mu]m to 200 [mu]m, preferably from 0.2 [mu]m to 20 [mu]m, and/or a mean lateral extent which is smaller than or equal to the wavelength of an ultrasonic wave which can be produced by the piezoelectric sensor unit.
Language
en
Institute
IZFP-D
Link
http://worldwide.espacenet.com/publicationDetails/biblio?DB=worldwide.espacenet.com&locale=en_EP&FT=D&CC=EP&NR=20100000489A
Patenprio
EP 20100000489 A: 20100119
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