Vorrichtung zum Ueberwachen von mit Laserstrahlung bearbeiteten Werkstuecken

Device for the monitoring of workpieces (6) machined by means of laser radiation, in particular CO<-2 laser radiation, having a focusing machining lens system (18) which directs the laser beam (1) onto the machining point (17), and a beam-reflecting mirror (2) arranged in the path of the laser beam (1), and directing at least one part of a secondary beam (7) radiated from the machining point (17) into the machining lens system (18) of an evaluation unit (10) to analyze said beam (7) during the machining process. In order to analyze the secondary beam with easy resources and without any problem, even in high-performance laser machining, the device is designed such that the beam-reflecting mirror (2) is provided in the reflection area (19-19) for the laser beam (1) with a diffraction grating (20) which directs a predetermined diffraction configuration of the secondary beam (7) onto the evaluation unit (10) and is designed as being ineffective in the wavelength band of said laser beam.