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Title
Materials, technology and reliability for advanced interconnects and low-k dielectrics
Title Supplement
Symposium held April 21 - 25, 2003, San Francisco, California, U.S.A. ; [Symposium E, held at the 2003 MRS spring meeting
Person Involved
Publisher
Publishing Place
Warrendale, Pa.
Publication Date
2003
Series
Materials Research Society Symposium Proceedings; 766
ISBN
1-558-99703-2