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Title
MEMS, MOEMS, and micromachining
Title Supplement
29 - 30 April 2004, Strasbourg, France
Person Involved
Corporate Author
European Optical Society -EOS-
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2004
Series
Proceedings of SPIE; 5455
ISBN
0-8194-5378-1