Title

20th European Conference on Mask Technology for Integrated Circuits and Microcomponents. Proceedings

Title Supplement

12 - 14 January 2004, Dresden, Germany

Person Involved

Corporate Author

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2004

Series

Proceedings of SPIE; 5504

ISBN

0-8194-5437-0

Conference