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Title
Materials for Advanced Metallization 2009
Title Supplement
Proceedings of the Eighteenth European Workshop on Materials for Advanced Metallization 2009, Grenoble, France, 08-11 March 2009
Person Involved
Publisher
Publishing Place
Amsterdam
Publication Date
2010
Series
Microelectronic engineering; 87.2010, Nr.3
ISSN
0167-9317