Title

Micromachined devices and components VI
Titel Supplements
18 - 19 September 2000, Santa Clara, USA
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
Verlagsort
Bellingham, WA
Datum
2000
Serie
Proceedings of SPIE
ISBN
0-8194-3832-4
Konferenz