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Title
Micromachined devices and components VI
Title Supplement
18 - 19 September 2000, Santa Clara, USA
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2000
Series
Proceedings of SPIE; 4176
ISBN
0-8194-3832-4