Title

China Semiconductor Technology International Conference, CSTIC 2014

Title Supplement

Held March 16 - 17, 2014 in Shanghai, China

Person Involved

Corporate Author

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Publisher

Publishing Place

Pennington, NJ

Publication Date

2014

Series

ECS transactions; 60.2014, Nr.1

ISBN

978-1-62332-149-9

978-1-60768-504-3

978-1-60768-505-0

Conference