Title

28th European Mask and Lithography Conference 2012

Title Supplement

17 - 18 January 2012, Dresden, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Publisher

Publishing Place

Bellingham, WA

Publication Date

2012

Series

Proceedings of SPIE; 8352

ISBN

978-0-8194-9030-8

Conference