Title

Micromachining and microfabrication process technology XV
Titel Supplements
26 January 2010, San Francisco, California, United States
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
Verlagsort
Bellingham, WA
Datum
2010
Serie
Proceedings of SPIE
ISBN
978-0-8194-7986-0
Konferenz