Title

E-MRS Spring Meeting Symposium L on Characterization of High-K Dielectric Materials 2006. Proceedings

Title Supplement

Nice, France, 29 May - 2 June 2006

Person Involved

Corporate Author

European Materials Research Society -EMRS-

Publisher

Publishing Place

Oxford

Publication Date

2006

Series

Materials science in semiconductor processing; 9.2006, Nr.6

ISSN

1369-8001

Conference