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Eight Micromechanics Europe Workshop 1997. Proceedings
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Title
Eight Micromechanics Europe Workshop 1997. Proceedings
Corporate Author
Univ. of Southampton
Publisher
Univ. Microelectronics Centre
Publishing Place
Southampton
Publication Date
1997
Conference
Workshop on Micromachining, Micromechanics and Microsystems 1997
Micromechanics Europe (MME) 1997
