Title

Materials science of microelectromechanical systems (MEMS) devices IV

Title Supplement

Symposium held November 25 - 28, 2001, Boston, Massachusetts, U.S.A.

Person Involved

Corporate Author

Materials Research Society -MRS-

Publisher

Publishing Place

Warrendale, Pa.

Publication Date

2002

Series

Materials Research Society Symposium Proceedings; 687

ISBN

1-558-99623-0

Conference