Title

MEMS 2017, 30th IEEE International Conference on Micro Electro Mechanical Systems

Title Supplement

Las Vegas, Nevada, USA, January 22-26 2017

Editor(s)

Meng, Ellis

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2017

ISBN

978-1-5090-5078-9

978-1-5090-5079-6

Conference