Title

Mask technology for integrated circuits and micro-components '98. Lectures held at the GMM Conference

Person Involved

Corporate Author

Bay Area Chrome Users Society

Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Publisher

Publishing Place

Berlin

Publication Date

1998

Series

GMM-Fachbericht; 25

ISBN

3-8007-2420-0