Title

Optical microlithography XIII

Title Supplement

1 - 3 March 2000, Santa Clara, California

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2000

Series

Proceedings of SPIE; 4000

ISBN

0-8194-3618-6

Conference