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Title
High Aspect Ratio Micro Structure Technology Workshop 2007. Special issue
Title Supplement
Besançon, France, 7 - 9 June 2007: HARMST'07 is the 7th in the series
Person Involved
Publisher
Publishing Place
Berlin
Publication Date
2008
Series
Microsystem technologies; 14.2008, Nr.9-11
ISSN
0946-7076