Title

Gettering and defect engineering in semiconductor technology XI, GADEST 2005

Title Supplement

Proceedings of the 11th international autumn meeting, Giens (close to Marseilles), France, September 25-30, 2005

Person Involved

Publisher

Publishing Place

Uetikon-Zurich

Publication Date

2005

Series

Diffusion and defect data. B, Solid state phenomena; 108/109

ISBN

3-908451-13-2

Conference