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Title
Data analysis and modeling for process control II
Title Supplement
3 - 4 March 2005, San Jose, California, USA
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2005
Series
Proceedings of SPIE; 5755
ISBN
0-8194-5735-3