Title

MOEMS and miniaturized systems VI

Title Supplement

24 - 25 January 2007, San Jose, California, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2007

Series

Proceedings of SPIE; 6466

ISBN

978-0-8194-6579-5

Conference