Title

Cleaning and surface conditioning technology in semiconductor device manufacturing 11

Title Supplement
The Eleventh International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing was held during the 216th meeting of the Electrochemical Society, in Vienna, Austria from October 4 to 9, 2009
Person Involved
Corporate Author
Electrochemical Society -ECS-, Electronics and Photonics Division
Publisher
Publishing Place
Pennington, NJ
Publication Date
2009
Series
ECS transactions; Vol.25, Nr.5
ISSN
1938-5862
ISBN
978-1-566-77742-1
978-1-60768-092-5
Conference
DDC
660