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Micro-Engineering '97. Tagungsband/Proceedings
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Title
Micro-Engineering '97. Tagungsband/Proceedings
Corporate Author
Institut für Mikrotechnik Mainz GmbH -IMM-
Stuttgarter Messe- und Kongreß-Gesellschaft, Stuttgart
Publisher
Messe Stuttgart
Publishing Place
Stuttgart
Publication Date
1997
Conference
Micro-Engineering, Kongreß für Mikrosysteme und Präzisionstechnik 1997