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EUROCVD 13. Thirteenth European Conference on Chemical Vapour Deposition
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Title
EUROCVD 13. Thirteenth European Conference on Chemical Vapour Deposition
Person Involved
Publisher
EDP Sciences
Publishing Place
Les Ulis
Publication Date
2001
Series
Journal de physique. 4, Proceedings; 11,3
ISBN
2-86883-549-X
Conference
European Conference on Chemical Vapour Deposition (EUROCVD) 2001